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US4674434: Apparatus for forming deposited film

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Filing Information

Inventor(s) Shunichi Ishihara ·
Assignee(s) Canon Kabushiki Kaisha ·
Attorney/Agent(s) Fitzpatrick, Cella, Harper & Scinto ·
Primary Examiner Thurman K. Page ·
Application Number US6751423
Filing date 07/03/1985
Issue date 06/23/1987
Predicted expiration date 07/03/2005
U.S. Classifications 118/501  · 118/620  ·
International Classifications C23C 1308  ·
Kind CodeA
International Classifications 118715;620;719;50.1;724;730 ·
Foreign Priority JP59140469 - 07/09/1984 ·
2 Claims, No Drawings


Abstract

An apparatus for forming a deposited film comprises a chamber, which can be brought into a reduced pressure, for forming a deposited film on a substrate by introducing a starting gas into said chamber and decomposing or polymerizing said gas, the apparatus is provided with both a means for decomposing or polymerizing said gas by discharging and a means for decomposing or polymerizing said gas by heat.

Independent Claims | See all claims (2)

  1. 1. An apparatus for forming a deposited film comprising:a first compartment for forming a film on a substrate through thermal decomposition or polymerization of a starting gas, said first compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a heat applying means;a second compartment for forming a film on a substrate through discharge decomposition or polymerization of a starting gas, said second compartment having an evacuation means, a starting gas introducing means, a substrate holding means, and a dischargae generating means; anda means for delivering a substrate into and out of the first and second compartments.

References Cited

U.S. Patent Documents

Document NumberAssigneesInventorsIssue/Pub Date
US4294194 Siemens Aktiengesellschaft Behn et al. Oct 1981
US4526805 Tokyo Shibaura Denki Kabushiki Kaisha Yoshizawa Jul 1985
US4539933 Anicon, Inc. Campbell et al. Sep 1985

Patent Family

Document NumberAssigneeInventorsIssue/Pub Date
US4674434 Canon Kabushiki Kaisha Shunichi Ishihara Jun 1987
US4806386 Canon Kabushiki Kaisha Shunichi Ishihara Feb 1989