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US6919592: Electromechanical memory array using nanotube ribbons and method for making same

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Filing Information

Inventor(s) Brent M. Segal · Darren K. Brock · Thomas Rueckes ·
Assignee(s) Nantero, Inc. ·
Attorney/Agent(s) Hale and Dorr LLP ·
Primary Examiner W. David Coleman ·
Application Number US9915093
Filing date 07/25/2001
Issue date 07/19/2005
Prior Publication Data
Predicted expiration date 09/28/2022
Patent term adjustment 430
U.S. Classifications 257/209  · 343/773  ·
International Classifications --
Kind CodeB2
International Classifications 257208 · 257209 · 257317 · 257320 · 257331 · 257343 · 257773 · 438668 · 438 52 · 438283 ·
Related U.S. Application DataCROSS-REFERENCE TO RELATED APPLICATIONS
This application is related to the following applications, all of which are filed on the same date that this application is filed, all of which are assigned to the assignee of this application, and all of which are incorporated by reference in their entirety:

Hybrid Circuit Having Nanotube Electromechanical Memory (U.S. patent application Ser. No. 09/915,095); now U.S. Pat. No. 6,574,130 and
Electromechanical Memory Having Cell Selection Circuitry Constructed with Nanotube Technology (U.S. patent application Ser. No. 09/915,173).
36 Claims, 17 Drawings


Abstract

Electromechanical circuits, such as memory cells, and methods for making same are disclosed. The circuits include a structure having electrically conductive traces and supports extending from a surface of the substrate, and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon comprises one or more nanotubes. The electro-mechanical circuit elements are made by providing a structure having electrically conductive traces and supports, in which the supports extend from a surface of the substrate. A layer of nanotubes is provided over the supports, and portions of the layer of nanotubes are selectively removed to form ribbons of nanotubes that cross the electrically conductive traces. Each ribbon includes one or more nanotubes.

Independent Claims | See all claims (36)

  1. 1. An electromechanical circuit, comprising: a structure having electrically conductive traces and supports extending from a surface of a substrate; and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon has a cross-sectional area that is substantially rectangular.
  2. 13. An electromechanical circuit, comprising: a structure having electrically conductive traces and supports extending from a surface of a substrate; and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon is flat.
  3. 25. An electromechanical circuit, comprising: a structure having electrically conductive traces and supports extending from a surface of a substrate; and nanotube ribbons suspended by the supports that cross the electrically conductive traces, wherein each ribbon comprises a plurality of nanotubes.

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