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US6924538: Devices having vertically-disposed nanofabric articles and methods of making the same

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Filing Information

Inventor(s) Venkatachalam C. Jaiprakash · Jonathan W. Ward · Thomas Rueckes · Brent M. Segal ·
Assignee(s) Nantero, Inc. ·
Attorney/Agent(s) Wilmer Cutler Pickering Hale and Dorr ·
Primary Examiner W. David Coleman ·
Application Number US10776572
Filing date 02/11/2004
Issue date 08/02/2005
Prior Publication Data
Predicted expiration date 07/25/2021
U.S. Classifications 257/415  ·
International Classifications --
Kind CodeB2
International Classifications 257415 · 438 50 ·
Related U.S. Application DataCROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Pat. Apl., Ser. No. 60/446,786, filed on Feb. 12, 2003, entitled Electro-Mechanical Switches and Memory Cells Using Vertically-Disposed Nanofabric Articles and Methods of Making the Same and to U.S. Pat. Apl. No. 60/446,783, filed on Feb. 12, 2003, entitled Electro-Mechanical Switches and Memory Cells Using Horizontally-Disposed Nanofabric Articles and Methods of Making the Same, which are incorporated herein by reference in their entirety.
This application is a continuation-in-part and claims priority under 35 U.S.C. §120 to the following applications which are expressly incorporated herein by reference in their entirety:
U.S. Pat. Apl. Ser. No. 09/915,093, filed on Jul. 25, 2001, entitled Electromechanical Memory Array Using Nanotube Ribbons and Method for Making Same;
U.S. Pat. Apl. Ser. No. 10/033,323, filed on Dec. 28, 2001, entitled Electromechanical Three-Trace Junction Devices.
U.S. Pat. Apl. Ser. No. 10/128,118, filed Apr. 23, 2002, U.S. Pat. No. 6,706,402 entitled Nanotube Films and Articles; and
U.S. Pat. Apl. Ser. No. 10/341,005, filed on Jan. 13, 2003, entitled Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and Articles.
16 Claims, 20 Drawings


Abstract

Electro-mechanical switches and memory cells using vertically-disposed nanofabric articles and methods of making the same are described. An electro-mechanical device, includes a structure having a major horizontal surface and a channel formed therein. A conductive trace is in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel. The article is electro-mechanically deflectable in a horizontal direction toward the conductive trace. Under certain embodiments, the vertically suspended extent of the nanotube article is defined by a thin film process. Under certain embodiments, the vertically suspended extent of the nanotube article is about 50 nanometers or less. Under certain embodiments, the nanotube article is clamped with a conducting material disposed in porous spaces between some nanotubes of the nanotube article. Under certain embodiments, the nanotube article is formed from a porous nanofabric. Under certain embodiments, the nanotube article is electromechanically deflectable into contact with the conductive trace and the contact is either a volatile state or non-volatile state depending on the device construction. Under certain embodiments, the vertically oriented device is arranged into various forms of three-trace devices. Under certain embodiments, the channel may be used for multiple independent devices, or for devices that share a common electrode.

Independent Claims | See all claims (16)

  1. 1. An electro-mechanical device, comprising: a structure having a major horizontal surface and a channel formed therein; a conductive trace in the channel; and a nanotube article vertically suspended in the channel, in spaced relation to a vertical wall of the channel, and electro-mechanically deflectable in a horizontal direction toward or away from the conductive trace.

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Referenced By

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