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US6945099: Torsional resonance mode probe-based instrument and method

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Filing Information

Inventor(s) Chanmin Su · Kenneth L. Babcock · Lin Huang ·
Assignee(s) Veeco Instruments Inc. ·
Attorney/Agent(s) Boyle Fredrickson Newholm Stein & Gratz S.C. ·
Primary Examiner Helen Kwok ·
Application Number US10189108
Filing date 07/02/2002
Issue date 09/20/2005
Predicted expiration date 07/02/2022
U.S. Classifications 731/5  ·
International Classifications --
Kind CodeB1
International Classifications 73105 · 73579 · 73649 · 73650 · 250306 · 250307 ·
65 Claims, 17 Drawings


Abstract

An apparatus and method of operating a probe-based instrument in a torsional mode. The method includes providing a probe having a cantilever defining a longitudinal axis and supporting a tip. In operation, the method torsionally oscillates the probe generally about the longitudinal axis at a resonance. In addition, the method changes a separation distance between the tip and a surface of a sample so the tip interacts with the surface during data acquisition. By detecting a change in the torsional oscillation of the cantilever in response to the interaction between the tip and the surface, forces, including shear forces and shear force gradients, between the tip and the surface can be measured to determine sub-nanometer features.

Independent Claims | See all claims (65)

  1. 1. A method of operating a probe-based instrument, the method comprising the steps of: providing a probe including a cantilever and a tip, the cantilever having a longitudinal axis; torsionally oscillating the probe generally about the axis at a resonance; and wherein said torsionally oscillating step is performed using an asymmetric transducer.
  2. 29. A method of measuring a property of a sample, the method comprising the steps of: driving a probe having a tip at a torsional resonance of the probe; changing a separation between the tip and the sample so as to cause interaction between the tip and the sample; detecting the interaction, wherein the interaction is indicative of one of a group including a shear force and a force gradient; and wherein said driving step is perfomed using an asymmetric transducer, and wherein the asymmetric transducer includes at least two sources of ultrasonic energy generally mounted on opposite sides of the tip and are driven by respective signals having at least one different property.
  3. 36. A probe-based instrument comprising: a probe assembly including a base and a probe, said probe having a cantilever extending from said base and a tip supported by said cantilever; a drive coupled to said probe assembly and configured to actuate said probe into torsional oscillation; and wherein said drive is asymmetric, and wherein said asymmetric drive includes at least two sources of ultrasonic energy generally mounted on opposite sides of the tip and are driven by different signals.
  4. 56. A drive for a probe-based instrument, the drive comprising: an actuator coupled to a probe assembly of the instrument, said probe assembly including a probe having a tip, and said actuator driving said probe at a torsional resonance thereof; and wherein said actuator includes a plurality of piezoelectric elements that are generally mounted on opposite sides of the tip and are driven by different signals.
  5. 57. A probe-based instrument comprising: a probe assembly including a probe having a cantilever and a tip supported by said cantilever; an actuator coupled to said probe assembly; a signal generator that transmits a modulated signal to said actuator to drive said probe into both flexural oscillation and torsional oscillation; and wherein said acutator includes a pair of piezoelectric elements mounted substantially on opposite sides of the tip, the piezoelectric elements driven by oscillating drive signals substantially 180° out of phase.
  6. 63. An apparatus to control and maintain generally constant probe/sample interaction using torsional resonance, comprising: a probe; a plurality of piezoelectric elements coupled to the probe and driven by independent drive signals having at least one different property so as to excite a torsional resonance of the probe; a displacement detection system to generally simultaneously sense flexural and torsional movement of said probe; an xyz actuator to provide relative motion between said probe and a sample in three generally orthogonal directions; and a feedback system coupled to said detection system and said actuator to maintain constant probe sample interaction in response to detecting a change in said torsional resonance of said probe.

Referenced By

Document NumberAssigneeInventorsIssue/Pub Date
US8601609 --
US8881311 --
US7350441 3M Innovative Properties Company Alan B. Campbell et al. Apr 2008
US7574903 Veeco Instruments Inc. Chanmin Su et al. Aug 2009
US7617736 California Institute of Technology Hongxing Tang et al. Nov 2009
US7328638 3M Innovative Properties Company Mark E. Gardiner et al. Feb 2008
US7395742 3M Innovative Properties Company Dale L. Ehnes et al. Jul 2008
US7404314 The Board of Trustees of the Leland Stanford Junior University Ozgur Sahin et al. Jul 2008
US7570061 National Institute of Advanced Industrial Science and Technology Masaharu Kuroda et al. Aug 2009
US7350442 3M Innovative Properties Company Dale L. Ehnes et al. Apr 2008
US7617719 The Dow Chemical Company Chanmin Su et al. Nov 2009
US7302856 California Institute of Technology Hongxing Tang et al. Dec 2007
US7395741 3M Innovative Properties Company Alan B. Campbell et al. Jul 2008
US7434476 Califronia Institute of Technology Hongxing Tang et al. Oct 2008
US7487701 3M Innovative Properties Company Alan B. Campbell et al. Feb 2009
US7290471 3M Innovative Properties Company Dale L. Ehnes et al. Nov 2007
US7552645 California Institute of Technology Igor Bargatin et al. Jun 2009
US7302833 The Board of Trustees of the Leland Stanford Junior University Ozgur Sahin et al. Dec 2007
US7398715 3M Innovative Properties Company Dale L. Ehnes et al. Jul 2008
US7293487 3M Innovative Properties Company Alan B. Campbell et al. Nov 2007
US7730770 Shimadzu Corporation Takeshi Ito et al. Jun 2010
US7757544 Veeco Instruments Inc. Lin Huang et al. Jul 2010
US7770231 Veeco Instruments, Inc. Craig Prater et al. Aug 2010
US8156568 Picocal, Inc. Angelo Gaitas et al. Apr 2012

Patent Family

Document NumberAssigneeInventorsIssue/Pub Date
AU2003281338 VEECO INSTR INC HUANG LIN et al. Jan 2004
US20050028583 Chanmin Su et al. Feb 2005
US6945099 Veeco Instruments Inc. Chanmin Su et al. Sep 2005