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US7088566: Charge control of micro-electromechanical device

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Filing Information

Inventor(s) Eric T. Martin · Mark Hunter · Arthur Piehl · James R. Przybyla · Matthew Gelhaus · Leslie Louis Szepesi, Jr. ·
Assignee(s) Hewlett-Packard Development Company, L.P. ·
Primary Examiner Stephen W. Jackson ·
Application Number US10942664
Filing date 09/15/2004
Issue date 08/08/2006
Prior Publication Data
Predicted expiration date 06/13/2023
Patent term adjustment 44
U.S. Classifications 361/207  · 361/278  ·
International Classifications H01H4700  ·
Kind CodeB2
Related U.S. Application DataThis application is a divisional of application Ser. No. 10/428,168 filed Apr. 30, 2003 now U.S. Pat. No. 6,829,132, herein incorporated by reference.
12 Claims, 5 Drawings


Abstract

A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.

Independent Claims | See all claims (12)

  1. 1. A charge control circuit for controlling a micro-electromechanical system (MEMS) device having a variable capacitor formed by a movable first conductive plate and a fixed second conductive plate separated by a variable gap distance, the charge control circuit comprising: a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.
  2. 8. A micro-electromechanical cell comprising: a micro-electromechanical system (MEMS) device having a variable capacitor formed by a movable first conductive plate and a fixed second conductive plate separated by a variable gap distance; and a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.

References Cited

U.S. Patent Documents

Document NumberAssigneesInventorsIssue/Pub Date
US6088214 Motorola, Inc. Malone et al. Jul 2000
US6229684 JDS Uniphase Inc. Cowen et al. May 2001
US6329738 Massachusetts Institute of Technology Hung et al. Dec 2001
US6339493 Scalora et al. Jan 2002
US6355534 Intel Corporation Cheng et al. Mar 2002
US6373682 MCNC Goodwin-Johansson Apr 2002
US6377438 MCNC Deane et al. Apr 2002
US6404304 LG Electronics Inc. Kwon et al. Jun 2002
US6418006 The Board of Trustees of the University of Illinois Liu et al. Jul 2002
US6441449 Motorola, Inc. Xu et al. Aug 2002
US6496348 McIntosh Dec 2002
US6496351 JDS Uniphase Inc. Hill et al. Dec 2002
US6509812 HRL Laboratories, LLC Sayyah Jan 2003
US6744335 Nokia Mobile Phones Ltd. Ryhanen et al. Jun 2004
US6829132* Hewlett-Packard Development Company, L.P. Martin et al. Dec 2004
* cited by examiner

Other Publications

Hung, Bmer S. et al., “Extending the Travel Range of Analog-Tuned Electrostatic Actuators,” Journal of Microelectromechanical Systems, vol. 8, No. 4, Dec. 1999.

Referenced By

Document NumberAssigneeInventorsIssue/Pub Date
US7298592 Samsung Electronics Co., Ltd. Haeng-soo Lee et al. Nov 2007