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US7174773: Leak-testing technique for differential pressure sensor array
Filing Information
Patent Family
17 Claims, 6 Drawings
Abstract
A leak-testing technique and apparatus for differential pressure sensor arrays is provided. A reference pressure sensor array is provided, wherein a seal is disposed between the reference pressure sensor array and a target differential pressure sensor array. A probe socket is utilized to communicate with each individual sensor in the reference pressure sensor array. The target pressure sensor array and the reference pressure sensor array are sealed via a pressure plate and plunger assembly. The target pressure sensor array, seal, and reference pressure sensor array are exposed to a first pressure. The target differential pressure sensor array, seal, and reference pressure sensor array are then exposed to a second pressure. The probe socket verifies that all reference pressure sensors continue to output the first pressure. If the probe socket identifies a reference pressure sensor that reads the second pressure, then the corresponding target pressure sensor is identified as being defective because of leakage.
- 1. A method for leak testing a target differential pressure sensor array comprising a plurality of target differential pressure sensors, the method comprising:
(a) providing a reference pressure sensor array having a plurality of reference pressure sensors;
(b) arranging said reference pressure sensor array and the target differential pressure sensor array such that each target differential pressure sensor is sealingly coupled to a reference pressure sensor;
(c) after step (b) subjecting said reference pressure sensor array and the target differential pressure sensor array to a first pressure and measuring a first output from each of said reference pressure sensors;
(d) after step (c) subjecting said reference pressure sensor array and the target differential pressure sensor array to a second pressure and measuring a second output from each of said reference pressure sensors; and
(e) determining whether or not any of said target differential pressure sensors are leaky based on the measurements from steps (c) and (d).
- 7. A leak-testing apparatus for testing a target differential pressure array having a plurality of target differential pressure sensors, comprising:
a reference pressure sensor array having a plurality of reference pressure sensors;
a seal adapted to allow said reference pressure sensor array to be sealingly disposed with the target differential pressure sensor array;
an interface circuit board;
a probe socket adapted to allow selective, electrical communication between each of said reference pressure sensors and said interface circuit board; and
means for determining if any of said differential pressure sensors are leaky based on signal outputs from said interface circuit board.
- 12. A method for leak-testing a plurality of target differential pressure sensor arrays, each having a plurality of target differential pressure sensors, comprising:
(a) providing a plurality of reference pressure sensor arrays each having a plurality of reference pressure sensors;
(b) sealingly coupling each target differential pressure sensor to a reference pressure sensor;
(c) after step (b) subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a first pressure and measuring a first output from each of said reference pressure sensors;
(d) after step (c) subjecting said plurality of reference pressure sensor arrays and the plurality of target differential pressure sensor arrays to a second pressure and measuring an output from each of said reference pressure sensors; and
(e) determining whether or not any of said target differential pressure sensors are leaky based on the measurements from steps (c) and (d).
References Cited
U.S. Patent Documents
Foreign Patent Documents
| Document Number | Assignees | Inventors | Issue/Pub Date |
| DE19705799* | UNIV DRESDEN TECH | | Aug 1998 |
* cited by examiner
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