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US7287412: Method and apparatus for sensing hydrogen gas

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Filing Information

Inventor(s) Kwok Ng · Greg Monty · Yunjun Li · Zvi Yaniv · Prabhu Soundarrajan ·
Assignee(s) Nano-Proprietary, Inc. ·
Attorney/Agent(s) Fish & Richardson, P.C. · Kelly Kordzik ·
Primary Examiner Hezron Williams ·
Assistant Examiner David A. Rogers ·
Application Number US10854420
Filing date 05/26/2004
Issue date 10/30/2007
Prior Publication Data
Predicted expiration date 05/26/2024
U.S. Classifications 73/233.1  · 73/310.6  · 73/310.5  ·
International Classifications G01N2704  · G01N3064  · G01N3322  ·
Kind CodeB2
Related U.S. Application DataCROSS-REFERENCE TO RELATED APPLICATIONS
The present invention claims priority to U.S. Provisional Application Ser. No. 60/475,558 filed Jun. 3, 2003.
12 Claims, 11 Drawings


Abstract

A hydrogen sensor and/or switch fabricated from an array of nanowires or a nanoparticle thick film composed of metal or metal alloys. The sensor and/or switch demonstrates a wide operating temperature range and shortened response time due to fabrication materials and methods. The nanowires or nanoparticle thick films demonstrate an increase in conductivity in the presence of hydrogen.

Independent Claims | See all claims (12)

  1. 1. An apparatus for sensing hydrogen comprising: a substrate comprising an insulating material; a conductive patterned layer deposited on the substrate; and a plurality of nanoparticles comprising palladium deposited on the conductive patterned layer, wherein the conductive patterned layer is oxidized to form a resistive layer; wherein some of the nanoparticles and portions of the resistive layer from at least one conductive path in the presence of hydrogen.
  2. 10. An apparatus for sensing hydrogen comprising: a substrate comprising an insulating material; a conductive patterned layer having a side-wall deposited on the substrate;and a palladium nanowire deposited to the side-wall, wherein the conductive patterned layer is oxidized to form a resistive layer, wherein a portion of the nanowire and a portion of the resistive path form at least one conductive path in the presence of hydrogen and lack a conductive path in the absence of hydrogen.

References Cited

U.S. Patent Documents

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Other Publications

Minhee Yun et al., “Nanowire Growth for Sensor Arrays,” to appear in Nanofabrication Technologies, Ed. E. A. Dobisz, SPIE Proceedings 5220, 2003, pp. 1-9.
Frederic Favier et al., “Hydrogen Sensors and Switches from Electrodeposited Palladium Mesowire Arrays,” Science, vol. 293, Sep. 21, 2001, pp. 2227-2231.
Favier et al., “Hydrogen Sensors and Switches from Electrodeposited Palladium Mesowire Arrays,” Science, pp. vol. 293, Sep. 21, 2001, pp. 2227-2231.
Jayaraman, V., et al., “Synthesis and Hydrogen Permeation Properties of Ultrathin Palladim-Silver Alloy Membranes,” Journal of Membrane Science, (104), 1995, pp. 251-262.
Keuler, J.N., et al. “Characterization of Electroless Plated Palladium-Silver Alloy Membranes,” Thin Sold Films, 347: 1999, pp. 91-98.
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Oh, Chanick, et al., “1H NMR Study of Hydrogen in Palladium Nanocrystals,” Journal of the Korean Physical Society, vol. 43, No. 6, Dec. 2003, pp. L958-L962.
Suleiman, et al., “The Effect of the Cluster Structure in the Phase Transition During Hydrogen Absorption,” Annual Reports of Deutsches Elektronen-Synchroton (DESY) (2002).
Suleiman, et al., “Pd-H Clusters: Non-Bulk Like Behaviour,” Annual Reports of Deutsches Elektronen-Synchroton (DESY) (2003).
Tong, H.D., et al., “A Hydrogen Separation Module Based on Wafer-Scale Micromachined Palladium-Silver Alloy Membranes,” IEEE, Transducers '03 The 12th International Conference on Solid State Sensors, Actuators and Microsystems, Boston, Jun. 8-12, 2003, pp. 1742-1745.
Walter, et al., “Sensors from Electrodeposited Metal Nanowires,” Surface and Interface Analysis, 2002; 34: pp. 409-412.
Yun, Minhee, et al., “Nanowire Growth for Sensors Arrays,” Nanofabrication Technologies, Ed. E.A. Dobisz, SPIE Proceedings 5220; Oct. 2003; pp. 1-9.
PCT Search Report for related application PCT/US03/27083; mailed May 27, 2004.
PCT Search Report for related application PCT/US04/17324; mailed Sep. 19, 2005.

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